Scanning near-field photon emission microscopy

Scanning near-field photon emission microscopy

A Scanning Near-field Photon Emission Microscope (SNPEM) for monitoring photon emission sites with a spatial resolution of between 50 to 200 nm is described. A protrusion type probe with a base diameter larger than a wavelength is proposed as a good compromise between resolution and sensitivity. Pho...

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Bibliographische Detailangaben
Hauptverfasser: Isakov, D., Geinzer, T., Tio, A., Phang, J.C.H., Zhang, Y., Balk, L.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Apertures
Failure analysis
Integrated circuit technology
Optical microscopy
Optical scattering
Optical sensors
Photonic integrated circuits
Probes
Spatial resolution
Stimulated emission
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Zusammenfassung:A Scanning Near-field Photon Emission Microscope (SNPEM) for monitoring photon emission sites with a spatial resolution of between 50 to 200 nm is described. A protrusion type probe with a base diameter larger than a wavelength is proposed as a good compromise between resolution and sensitivity. Photon emissions from silicon pn junction and n-MOSFET have been detected with resolution clearly better than the far-field PEM (FFPEM). Features in photon emission distribution smaller than 200 nm were revealed in spite the fact that metal lines prevented the SNPEM probe to reach near-field condition with an actual emission source.
ISSN:1541-7026
1938-1891
DOI:10.1109/RELPHY.2008.4558947