Design of Integrated RF Modules with Process Control Monitors on Liquid Crystalline Polymer Substrates for Large Volume Manufacturing

Design of Integrated RF Modules with Process Control Monitors on Liquid Crystalline Polymer Substrates for Large Volume Manufacturing

In this paper, we present process control monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Chung-Seok Seo, Sung-Hwan Min, Ward, C., Wallace, P., White, G., Swaminathan, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Circuit testing
component
Costs
Crystallization
High-K
LCP
Liquid crystal polymers
Manufacturing processes
Measurement
Modeling
Module design
Multilayer organic
Nonhomogeneous media
PCM
Phase change materials
Process control
Radio frequency
Substrates
Test
Yield
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this paper, we present process control monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.
ISSN:2165-4727
2165-4743
DOI:10.1109/APMC.2007.4554561