BD180 - a new 0.18 μm BCD (Bipolar-CMOS-DMOS) Technology from 7V to 60V

BD180 - a new 0.18 μm BCD (Bipolar-CMOS-DMOS) Technology from 7V to 60V

We present a new BCD technology in a 0.18 μm technology platforms with a capability of 7 to 60V high-voltage devices such as DEMOS and LDMOS. The developed 0.18 mum BCD process provides various kinds of high voltage LDMOS such as 7, 12, 20, 50, 60 V LDMOS transistors for variety of applications. The...

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Hauptverfasser: Il-Yong Park, Yong-Keon Choi, Kwang-Young Ko, Chul-Jin Yoon, Bon-Keun Jun, Mi-Young Kim, Hyon-Chol Lim, Nam-Joo Kim, Kwang-Dong Yoo
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Auditory displays
CMOS logic circuits
CMOS process
CMOS technology
Diodes
EPROM
Logic devices
MIM capacitors
Resistors
Voltage
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Beschreibung
Zusammenfassung:We present a new BCD technology in a 0.18 μm technology platforms with a capability of 7 to 60V high-voltage devices such as DEMOS and LDMOS. The developed 0.18 mum BCD process provides various kinds of high voltage LDMOS such as 7, 12, 20, 50, 60 V LDMOS transistors for variety of applications. The power LDMOS transistors in the process have very competitive specific on-resistance compared to previous results.
ISSN:1063-6854
1946-0201
DOI:10.1109/ISPSD.2008.4538898