Circular MEM resonator: Modeling second order effects on resonance frequency

Circular MEM resonator: Modeling second order effects on resonance frequency

This paper suggests an analytical model for the second order effects on the resonance frequency of circular MEM resonator vibrating at the 0 th order mode of vibration (pure radial). This model takes into consideration second order effects is compared to FEM simulation to verify the analytical model...

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Bibliographische Detailangaben
Hauptverfasser: Nada, Y.S., Stoffels, S., Tilmans, H.A.C., Hegazi, E., Ragai, H.F., Shaarawi, A.M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Analytical models
Boundary conditions
Microelectronics
Radio frequency
Resonance
Resonant frequency
Resonator filters
Stress
Transducers
Vibrations
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Beschreibung
Zusammenfassung:This paper suggests an analytical model for the second order effects on the resonance frequency of circular MEM resonator vibrating at the 0 th order mode of vibration (pure radial). This model takes into consideration second order effects is compared to FEM simulation to verify the analytical model.
DOI:10.1109/ESIME.2008.4525089