A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers

There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will...

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Hauptverfasser: Furuhashi, F., Yago, H., Kagawa, T., Yamaguchi, J., Furuichi, O., Imaoka, K., Houkida, T.
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container_start_page 447
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creator Furuhashi, F.
Yago, H.
Kagawa, T.
Yamaguchi, J.
Furuichi, O.
Imaoka, K.
Houkida, T.
description There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will apply countermeasures to the probers or not.
doi_str_mv 10.1109/ISSM.2006.4493132
format Conference Proceeding
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Dielectric films
Electric breakdown
Electrostatics
Ink
Integrated circuit testing
Needles
Probes
Voltage measurement
title A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers
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