A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers
There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will...
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creator | Furuhashi, F. Yago, H. Kagawa, T. Yamaguchi, J. Furuichi, O. Imaoka, K. Houkida, T. |
description | There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will apply countermeasures to the probers or not. |
doi_str_mv | 10.1109/ISSM.2006.4493132 |
format | Conference Proceeding |
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In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will apply countermeasures to the probers or not.</abstract><pub>IEEE</pub><doi>10.1109/ISSM.2006.4493132</doi><tpages>3</tpages></addata></record> |
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subjects | Dielectric films Electric breakdown Electrostatics Ink Integrated circuit testing Needles Probes Voltage measurement |
title | A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers |
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