A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers

A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers

There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will...

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Bibliographische Detailangaben
Hauptverfasser: Furuhashi, F., Yago, H., Kagawa, T., Yamaguchi, J., Furuichi, O., Imaoka, K., Houkida, T.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Dielectric films
Electric breakdown
Electrostatics
Ink
Integrated circuit testing
Needles
Probes
Voltage measurement
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Beschreibung
Zusammenfassung:There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will apply countermeasures to the probers or not.
ISSN:1523-553X
DOI:10.1109/ISSM.2006.4493132