Nano-thickness Stellar Defects

Nano-thickness Stellar Defects

New type defects which are nanometer-thickness stellar shape defects called as the stellar defects are reported. Since the stellar defects need the center particle and the water to form, we successfully have reduced the stellar defects by reducing the particles and humidity in the chamber. These ver...

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Bibliographische Detailangaben
Hauptverfasser: Moriya, T., Yamawaku, J., Ryu, Y., Nagaike, H., Yakushiji, H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Crystallization
Electrons
Humidity
Large scale integration
Plasma applications
Plasma materials processing
Plasma measurements
Refrigeration
Shape
Silicon
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Beschreibung
Zusammenfassung:New type defects which are nanometer-thickness stellar shape defects called as the stellar defects are reported. Since the stellar defects need the center particle and the water to form, we successfully have reduced the stellar defects by reducing the particles and humidity in the chamber. These very thin defects must be key issues in the processes that we have to control nanometer thickness.
ISSN:1523-553X
DOI:10.1109/ISSM.2006.4493092