Diamond micro and nano resonators using laser, capacitive or piezoresistive detection

Design, fabrication and testing of polycrystalline diamond (poly-C) micro and nano resonators are reported using laser, capacitive or piezoresistive detection. Important diamond MEMS fabrication issues, including micro-masking in dry etching, are also addressed. The resonators consisted of undoped poly-C (grown at 700degC or 780degC) cantilever beams with lengths, widths and thicknesses in the ranges of 40 - 2000 mum, 10 - 200 mum and 0.6 - 2 mum, respectively. The ploy-C piezoresistors, in-situ boron doped (p = 1 - 10 Omega*cm) at 700degC, had lengths, widths and thickness in the ranges of 24 - 42 mum, 3-12 mum and 0.5 mum, respectively. The early results of measurement using piezoelectric actuation and laser detection, in a vacuum chamber held at 10 s torr, are very encouraging.