Design and fabrication of a MEMS-based multi-sensor
In this paper, a newly-designed tamper detection multi-sensor with various functions is proposed. The multi-sensor consists of three different sensors, a piezoresistive sensor with and without mass, a proximity sensor, and a photodiode sensor, which use MEMS technology. The various components of the...
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| creator | Duk-Soo Eun Dae-Young Kong Hyun-Jun Yoo Young-Myong Hong Jong-Min Jang Tae-Wook Kang In-Sik Yu Jong-Hyun Lee |
| description | In this paper, a newly-designed tamper detection multi-sensor with various functions is proposed. The multi-sensor consists of three different sensors, a piezoresistive sensor with and without mass, a proximity sensor, and a photodiode sensor, which use MEMS technology. The various components of the multi-sensor, could perceive different types of external tampers independently, resulting in more reliable responses. The multi-sensor could be applied to detect external tampers on various types of system and mobile units. |
| doi_str_mv | 10.1109/NEMS.2008.4484401 |
| format | Conference Proceeding |
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The multi-sensor consists of three different sensors, a piezoresistive sensor with and without mass, a proximity sensor, and a photodiode sensor, which use MEMS technology. The various components of the multi-sensor, could perceive different types of external tampers independently, resulting in more reliable responses. 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| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 1424419077 |
| ispartof | 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2008, p.588-591 |
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| language | eng |
| recordid | cdi_ieee_primary_4484401 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Capacitive sensors Fabrication Industrial training Intelligent sensors Mechanical sensors Micromechanical devices multi-sensor photodiode sensor Photodiodes Piezoresistance piezoresistive sensor proximity sensor Sensor systems Vibrations |
| title | Design and fabrication of a MEMS-based multi-sensor |
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