Design and fabrication of a MEMS-based multi-sensor

In this paper, a newly-designed tamper detection multi-sensor with various functions is proposed. The multi-sensor consists of three different sensors, a piezoresistive sensor with and without mass, a proximity sensor, and a photodiode sensor, which use MEMS technology. The various components of the multi-sensor, could perceive different types of external tampers independently, resulting in more reliable responses. The multi-sensor could be applied to detect external tampers on various types of system and mobile units.