Field emission from hafnium carbide

An electron source for a high resolution SEM/TEM application should produce a high brightness, have a minimal energy distribution, and should be highly stable. In an application in which the resolution is limited by chromatic aberrations, one can improve the performance over a commonly used thermal...

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Hauptverfasser: Kagarice, K.J., Magera, G.G., Scheinfein, M.R., Mackie, W.A.
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:An electron source for a high resolution SEM/TEM application should produce a high brightness, have a minimal energy distribution, and should be highly stable. In an application in which the resolution is limited by chromatic aberrations, one can improve the performance over a commonly used thermal field emission source, such as a ZrOW Schottky emitter, by using a cold field emission source (CFE).
ISSN:2164-2370
DOI:10.1109/IVNC.2007.4480954