Field emission from hafnium carbide
An electron source for a high resolution SEM/TEM application should produce a high brightness, have a minimal energy distribution, and should be highly stable. In an application in which the resolution is limited by chromatic aberrations, one can improve the performance over a commonly used thermal...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | An electron source for a high resolution SEM/TEM application should produce a high brightness, have a minimal energy distribution, and should be highly stable. In an application in which the resolution is limited by chromatic aberrations, one can improve the performance over a commonly used thermal field emission source, such as a ZrOW Schottky emitter, by using a cold field emission source (CFE). |
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ISSN: | 2164-2370 |
DOI: | 10.1109/IVNC.2007.4480954 |