New technology for high throughput THz BioMEMS

We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer dep...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Mille, V., Bourzgui, N.E., Vivien, C., Supiot, P., Bocquet, B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomedical Engineering BioMEMS Biosensing Techniques - instrumentation Biosensor Biosensors Biotechnology Electromagnetic Phenomena Engineering Sciences Equipment Design Microelectronics Microfluidic Microfluidic Analytical Techniques Microfluidics Microsystems Microtechnology Optical surface waves Plasma applications Plasma chemistry Plasma materials processing Plasma polymer Polymers Silicon Surface Properties Terahertz Throughput
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer deposited by a "cold" plasma technique. We can use it for a surface functionalization or for the encapsulation with plasma assisted wafer bonding
ISSN:	1557-170X
DOI:	10.1109/IEMBS.2006.260289