Fabrication of a Micro-Fluidic Filter/Channel using MEMS Technology

This paper investigates the design and fabrication of a micro-fluidic filter/channel using different methods. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by microblaster process, and HNA solution etching. It is expect...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Duk-Soo Eun, Dae-Young Kong, Hyun-Jun Yoo, Young-Myong Hong, Jong-Min Jang, Pyung Choi, Seong Ho Kong, Jang-Kyoo Shin, Jong-Hyun Lee, In-Sik Yu
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biological materials Computer science Etching Fabrication Filters Immune system Microfluidics Micromechanical devices Organic materials Silicon
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