Fabrication of a Micro-Fluidic Filter/Channel using MEMS Technology

Fabrication of a Micro-Fluidic Filter/Channel using MEMS Technology

This paper investigates the design and fabrication of a micro-fluidic filter/channel using different methods. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by microblaster process, and HNA solution etching. It is expect...

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Hauptverfasser: Duk-Soo Eun, Dae-Young Kong, Hyun-Jun Yoo, Young-Myong Hong, Jong-Min Jang, Pyung Choi, Seong Ho Kong, Jang-Kyoo Shin, Jong-Hyun Lee, In-Sik Yu
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biological materials
Computer science
Etching
Fabrication
Filters
Immune system
Microfluidics
Micromechanical devices
Organic materials
Silicon
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Beschreibung
Zusammenfassung:This paper investigates the design and fabrication of a micro-fluidic filter/channel using different methods. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by microblaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.
DOI:10.1109/IMNC.2007.4456246