Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD

Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD

Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the G...

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Hauptverfasser: Minari, C., Kometani, R., Nakamatsu, K., Kanda, K., Haruyama, Y., Kaito, T., Matsui, S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acceleration
Chemical technology
Diamond-like carbon
Ion beams
Nanotechnology
Optical device fabrication
Optical devices
Tail
Voltage
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creator Minari, C.
Kometani, R.
Nakamatsu, K.
Kanda, K.
Haruyama, Y.
Kaito, T.
Matsui, S.
description Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the Gaussian profile of Ga + ion beam.
doi_str_mv 10.1109/IMNC.2007.4456204
format Conference Proceeding
fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_4456204</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4456204</ieee_id><sourcerecordid>4456204</sourcerecordid><originalsourceid>FETCH-LOGICAL-i105t-aa00b4f775018eb7caee43877b37c4b9e9ad2de59d20f13dc038c4951d6e50483</originalsourceid><addsrcrecordid>eNotj8tKw0AYRgdEUGoeQNzMC0z859bJLDVtbKAqeF2WufyRkdiUSSr07RXttzmczYGPkEsOJedgr9v7h7oUAKZUSs8FqBNSWFMpa0EoI5Q9I8U4fsLvpNWai3OyWH67fu-mNGzp0NEnHId-_2fdkGmTEdnzzgVk7ymn7QdtnM8puAkj9QfatLesfltckNPO9SMWR87Ia7N8qVds_XjX1jdrljjoiTkH4FVnjAZeoTfBISpZGeOlCcpbtC6KiNpGAR2XMYCsgrKaxzlqUJWckav_bkLEzS6nL5cPm-NX-QMxYEh7</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Minari, C. ; Kometani, R. ; Nakamatsu, K. ; Kanda, K. ; Haruyama, Y. ; Kaito, T. ; Matsui, S.</creator><creatorcontrib>Minari, C. ; Kometani, R. ; Nakamatsu, K. ; Kanda, K. ; Haruyama, Y. ; Kaito, T. ; Matsui, S.</creatorcontrib><description>Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the Gaussian profile of Ga + ion beam.</description><identifier>ISBN: 9784990247249</identifier><identifier>ISBN: 4990247248</identifier><identifier>DOI: 10.1109/IMNC.2007.4456204</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acceleration ; Chemical technology ; Diamond-like carbon ; Ion beams ; Nanotechnology ; Optical device fabrication ; Optical devices ; Tail ; Voltage</subject><ispartof>2007 Digest of papers Microprocesses and Nanotechnology, 2007, p.262-263</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4456204$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4456204$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Minari, C.</creatorcontrib><creatorcontrib>Kometani, R.</creatorcontrib><creatorcontrib>Nakamatsu, K.</creatorcontrib><creatorcontrib>Kanda, K.</creatorcontrib><creatorcontrib>Haruyama, Y.</creatorcontrib><creatorcontrib>Kaito, T.</creatorcontrib><creatorcontrib>Matsui, S.</creatorcontrib><title>Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD</title><title>2007 Digest of papers Microprocesses and Nanotechnology</title><addtitle>IMNC</addtitle><description>Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the Gaussian profile of Ga + ion beam.</description><subject>Acceleration</subject><subject>Chemical technology</subject><subject>Diamond-like carbon</subject><subject>Ion beams</subject><subject>Nanotechnology</subject><subject>Optical device fabrication</subject><subject>Optical devices</subject><subject>Tail</subject><subject>Voltage</subject><isbn>9784990247249</isbn><isbn>4990247248</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2007</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj8tKw0AYRgdEUGoeQNzMC0z859bJLDVtbKAqeF2WufyRkdiUSSr07RXttzmczYGPkEsOJedgr9v7h7oUAKZUSs8FqBNSWFMpa0EoI5Q9I8U4fsLvpNWai3OyWH67fu-mNGzp0NEnHId-_2fdkGmTEdnzzgVk7ymn7QdtnM8puAkj9QfatLesfltckNPO9SMWR87Ia7N8qVds_XjX1jdrljjoiTkH4FVnjAZeoTfBISpZGeOlCcpbtC6KiNpGAR2XMYCsgrKaxzlqUJWckav_bkLEzS6nL5cPm-NX-QMxYEh7</recordid><startdate>200711</startdate><enddate>200711</enddate><creator>Minari, C.</creator><creator>Kometani, R.</creator><creator>Nakamatsu, K.</creator><creator>Kanda, K.</creator><creator>Haruyama, Y.</creator><creator>Kaito, T.</creator><creator>Matsui, S.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200711</creationdate><title>Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD</title><author>Minari, C. ; Kometani, R. ; Nakamatsu, K. ; Kanda, K. ; Haruyama, Y. ; Kaito, T. ; Matsui, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i105t-aa00b4f775018eb7caee43877b37c4b9e9ad2de59d20f13dc038c4951d6e50483</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Acceleration</topic><topic>Chemical technology</topic><topic>Diamond-like carbon</topic><topic>Ion beams</topic><topic>Nanotechnology</topic><topic>Optical device fabrication</topic><topic>Optical devices</topic><topic>Tail</topic><topic>Voltage</topic><toplevel>online_resources</toplevel><creatorcontrib>Minari, C.</creatorcontrib><creatorcontrib>Kometani, R.</creatorcontrib><creatorcontrib>Nakamatsu, K.</creatorcontrib><creatorcontrib>Kanda, K.</creatorcontrib><creatorcontrib>Haruyama, Y.</creatorcontrib><creatorcontrib>Kaito, T.</creatorcontrib><creatorcontrib>Matsui, S.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Minari, C.</au><au>Kometani, R.</au><au>Nakamatsu, K.</au><au>Kanda, K.</au><au>Haruyama, Y.</au><au>Kaito, T.</au><au>Matsui, S.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD</atitle><btitle>2007 Digest of papers Microprocesses and Nanotechnology</btitle><stitle>IMNC</stitle><date>2007-11</date><risdate>2007</risdate><spage>262</spage><epage>263</epage><pages>262-263</pages><isbn>9784990247249</isbn><isbn>4990247248</isbn><abstract>Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the Gaussian profile of Ga + ion beam.</abstract><pub>IEEE</pub><doi>10.1109/IMNC.2007.4456204</doi><tpages>2</tpages></addata></record>
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Acceleration
Chemical technology
Diamond-like carbon
Ion beams
Nanotechnology
Optical device fabrication
Optical devices
Tail
Voltage
title Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-07T06%3A52%3A41IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Evaluation%20of%20Resolution%20for%20Free-Space-Wiring%20Fabricated%20by%20FIB-CVD&rft.btitle=2007%20Digest%20of%20papers%20Microprocesses%20and%20Nanotechnology&rft.au=Minari,%20C.&rft.date=2007-11&rft.spage=262&rft.epage=263&rft.pages=262-263&rft.isbn=9784990247249&rft.isbn_list=4990247248&rft_id=info:doi/10.1109/IMNC.2007.4456204&rft_dat=%3Cieee_6IE%3E4456204%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=4456204&rfr_iscdi=true