Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD

Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD

Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the G...

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Bibliographische Detailangaben
Hauptverfasser: Minari, C., Kometani, R., Nakamatsu, K., Kanda, K., Haruyama, Y., Kaito, T., Matsui, S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acceleration
Chemical technology
Diamond-like carbon
Ion beams
Nanotechnology
Optical device fabrication
Optical devices
Tail
Voltage
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Beschreibung
Zusammenfassung:Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the Gaussian profile of Ga + ion beam.
DOI:10.1109/IMNC.2007.4456204