Perspectives on integrated metrology and wafer-level control

In this paper, we will discuss the critical factors that are driving the implementation progress of integrated metrology (IM) and wafer-level advanced process control (APC). We will describe the potential benefits of IM and the engineering roadblocks that have limited the realization of those benefi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lensing, K., Stirton, B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Control systems Electrical equipment industry Feedback Feedforward systems Manufacturing industries Metrology Process control Sampling methods Time measurement Vehicles
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