Fabrication and Characterization of Carbon Nanotube Interconnects

Fabrication and Characterization of Carbon Nanotube Interconnects

We have fabricated arrays of individual metallic multi-wall carbon nanotube interconnects. We have also collected about two hundred resistance measurements to compare four different contact metals: Al, Au, Ti and Pd. Au and Pd contacts gave the lowest resistance. To validate the concept of high-spee...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Close, G.F., Wong, H.-S.P.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Carbon nanotubes
Conductivity
Contact resistance
Copper
Electric resistance
Electric variables measurement
Electrical resistance measurement
Fabrication
Gold
Radio frequency
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Beschreibung
Zusammenfassung:We have fabricated arrays of individual metallic multi-wall carbon nanotube interconnects. We have also collected about two hundred resistance measurements to compare four different contact metals: Al, Au, Ti and Pd. Au and Pd contacts gave the lowest resistance. To validate the concept of high-speed carbon nanotube (CNT) interconnect, we have extended our electrical measurements of individual multi-wall carbon nanotubes (MWCNTs) into the radio-frequency regime up to 15 GHz. We also discuss the reasons why the conductivity of commercial MWCNTs is not yet competitive with copper.
ISSN:0163-1918
2156-017X
DOI:10.1109/IEDM.2007.4418902