RF transmission lines and spiral inductors using polymer-core conductor

RF transmission lines and spiral inductors using polymer-core conductor

Thick RF transmission lines and spiral inductors were made using polymer-core conductor. The proposed fabrication process to make polymer-core conductor is very easy and cost effective compared with other RF MEMS processes. SU-8 photoresist was used as core. The fabricated transmission line and spir...

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Bibliographische Detailangaben
Hauptverfasser: Jong-Min Yook, Kyoung-Min Kim, Sung-Ku Yeo, Je-In Yu, Young-Se Kwon
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Conductors
Costs
Fabrication
High Q
Index Terms
Inductor
Inductors
Polymer-core conductors
Polymers
Radio frequency
Radiofrequency microelectromechanical systems
Resists
Spirals
SU-8
Transmission lines
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Beschreibung
Zusammenfassung:Thick RF transmission lines and spiral inductors were made using polymer-core conductor. The proposed fabrication process to make polymer-core conductor is very easy and cost effective compared with other RF MEMS processes. SU-8 photoresist was used as core. The fabricated transmission line and spiral inductors on a HRS (high resistivity silicon, 2500 Omegaldrcm) have S21 of 0.08 dB/mm at 18 GHz and high Q factor more than 40 at 2 GHz respectively.
DOI:10.1109/EMICC.2007.4412720