Advances in High-Pulse Energy Excimer Laser and Applications

Advances in High-Pulse Energy Excimer Laser and Applications

Pulsed excimer lasers offer a unique combination of high pulse energy and short pulse duration in the UV wavelengths. These characteristics combine to provide an exceptional photonics tool for the commercialization of novel applications such as pulsed laser deposition in thin-film manufacturing, LTP...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chang, A., Paetzel, R., Herbst, L., Fechner, B.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Annealing
Automotive engineering
Commercialization
Laser applications
Manufacturing
Optical pulses
Photonics
Pulsed laser deposition
Sputtering
Surface emitting lasers
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Beschreibung
Zusammenfassung:Pulsed excimer lasers offer a unique combination of high pulse energy and short pulse duration in the UV wavelengths. These characteristics combine to provide an exceptional photonics tool for the commercialization of novel applications such as pulsed laser deposition in thin-film manufacturing, LTPS annealing in FPD, surface hardening in automotive, and direct patterning in advanced packaging markets.
DOI:10.1109/CLEOPR.2007.4391449