Gas Detection using a Micromachined FTIR Spectrometer

This communication reports on the application of a silicon micromachined lamellar grating interferometer in a Fourier transform infrared (FTIR) spectrometer for the detection of gases in the IR region. The goal of this work was the evaluation of the gas detection capability of a silicon micromachined FTIR spectrometer in close relation to potential applications. The research was focused on the measurements of specific gases in the NIR region in order to determine the limit of detection and the selectivity that could be obtained using such a micro-spectrometer. The performed gas measurements showed the proof of principle of the micro FTIR gas analyser, and identified the need to expand the spectral range of the system towards the middle infrared radiation (MIR). Work performed on a micro FTIR gas analyzer operating in the MIR region with the spectrometer combined with other miniaturized components (IR source and White cell) is also reported.