Holographic nano-imaging realized with compact extreme ultraviolet lasers

Holographic nano-imaging realized with compact extreme ultraviolet lasers

Table top nano-holography with EUV laser was demonstrated. The hologram was recorded in a photoresist and digitized with an AFM. The image was reconstructed achieving 164 nm lateral resolution determined using wavelet analysis and image correlation.

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Bibliographische Detailangaben
Hauptverfasser: Marconi, M.C., Wachulak, P.W., Bartels, R.A., Menoni, C.S., Rocca, J.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
High-resolution imaging
Holography
Image analysis
Image reconstruction
Image resolution
Laser theory
Resists
Spatial resolution
Ultraviolet sources
Wavelet analysis
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Beschreibung
Zusammenfassung:Table top nano-holography with EUV laser was demonstrated. The hologram was recorded in a photoresist and digitized with an AFM. The image was reconstructed achieving 164 nm lateral resolution determined using wavelet analysis and image correlation.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2007.4382493