Laser Doppler Vibrometer Using a 45°-angled Optical Fiber for In-plane Dynamic Measurement of MEMS Actuators

Laser Doppler Vibrometer Using a 45°-angled Optical Fiber for In-plane Dynamic Measurement of MEMS Actuators

A FOLDV (fiber optic laser doppler vibrometer) using a 45deg-angled optical fiber with a self-aligned micro lens can be used to measure the in-plane dynamic motion of microstructure that does not allow optical access in sidewall direction. This system features a good immunity to external disturbance...

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Bibliographische Detailangaben
Hauptverfasser: Man Geun Kim, Kyoungwoo Jo, Youngsik Park, Wongun Jang, Jong-Hyun Lee
Format: Tagungsbericht
Sprache:eng
Schlagworte:
45° Angled optical fiber
Actuators
Assembly systems
Fiber lasers
in-plane motion
Lenses
Micro lens
Micromechanical devices
Microstructure
Motion measurement
Optical devices
Optical fibers
Vibrometer
Vibrometers
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Beschreibung
Zusammenfassung:A FOLDV (fiber optic laser doppler vibrometer) using a 45deg-angled optical fiber with a self-aligned micro lens can be used to measure the in-plane dynamic motion of microstructure that does not allow optical access in sidewall direction. This system features a good immunity to external disturbance and easy alignment of optical components during system assembly. The performance of the proposed fiber-based vibrometer is evaluated in terms of signal stability, and compared with other type of LDV.
ISSN:2160-5033
DOI:10.1109/OMEMS.2007.4373841