Performance Assessment of Run-to-Run EWMA Controllers

An iterative method is developed to optimize a performance criterion for best achievable performance for discrete integral controllers used in run-to-run control. An analytical expression is derived so that a realistic assessment of the given integral controller is obtained. Using the theoretical eq...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2007-11, Vol.20 (4), p.381-385
Hauptverfasser:	Prabhu, A.V., Edgar, T.F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Assessments Control systems Controllers Degradation Electronics Exact sciences and technology Exact solutions Feedback control Feedback control delay Filtering integral control Integrals Iterative methods Mathematical analysis Microelectronic fabrication (materials and surfaces technology) MIMO Optimal control Optimization methods Performance analysis Performance assessment Semiconductor device manufacture Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors single loop Utilities
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Beschreibung
Zusammenfassung:	An iterative method is developed to optimize a performance criterion for best achievable performance for discrete integral controllers used in run-to-run control. An analytical expression is derived so that a realistic assessment of the given integral controller is obtained. Using the theoretical equivalence of discrete integral and exponentially weighted moving average (EWMA) controllers, the method is then extended to performance assessment of EWMA controllers. A semiconductor manufacturing example is used to illustrate the utility of the method.
ISSN:	0894-6507 1558-2345
DOI:	10.1109/TSM.2007.907611