65nm CMOS BULK to SOI comparison

65nm CMOS BULK to SOI comparison

SOI is today mainly used for high-speed CPU applications. The advantages brought by SOI are still questioned or not clearly understood and little information has been published about the comparison between bulk and SOI CMOS. First reason is that this comparison to be representative must be done for...

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Bibliographische Detailangaben
Hauptverfasser: Pelloie, J.L., Laplanche, Y., Chen, T.F., Huang, Y.T., Liu, P.W., Chiang, W.T., Huang, M.Y.T., Tsai, C.H., Cheng, Y.C., Tsai, C.T., Ma, G.H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Circuit simulation
Circuit synthesis
CMOS logic circuits
Delay
Frequency
Implants
Integrated circuit interconnections
Semiconductor films
Silicon
Threshold voltage
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Beschreibung
Zusammenfassung:SOI is today mainly used for high-speed CPU applications. The advantages brought by SOI are still questioned or not clearly understood and little information has been published about the comparison between bulk and SOI CMOS. First reason is that this comparison to be representative must be done for same process features such as gate length and gate oxide thickness, second reason is that designing the same circuit in both bulk and SOI requires a significant investment. 65nm CMOS bulk and SOI both developed at UMC 12" facility with same process features are compared in this paper.
ISSN:1078-621X
2577-2295
DOI:10.1109/SOI.2007.4357861