Wafer Defects Detecting and Classifying System Based on Machine Vision

Wafer Defects Detecting and Classifying System Based on Machine Vision

The wafer defects detecting and classifying system based on machine vision aims at inspecting macro wafer defects. After acquiring disk images using CCD, through digital images process we realized defects inspection and defects segmentation. Finally defects classification was achieved by neural netw...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Zeng Zhen, Dai Shuguang, Mu Ping'an
Format: Tagungsbericht
Sprache:eng
Schlagworte:
defect detection
Digital images
image process
Image segmentation
Inspection
Instruments
Machine vision
Mirrors
neural network
Neural networks
Optical distortion
Optical fiber networks
Optical reflection
wafer
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Beschreibung
Zusammenfassung:The wafer defects detecting and classifying system based on machine vision aims at inspecting macro wafer defects. After acquiring disk images using CCD, through digital images process we realized defects inspection and defects segmentation. Finally defects classification was achieved by neural networks. The experiment results prove that the proposed system features a strong background of specialty and can be applied into practice.
DOI:10.1109/ICEMI.2007.4351196