An Integrated Micro-Analytical System for Complex Vapor Mixtures

A micro gas chromatograph (μGC) capable of quantitatively analyzing the components of complex vapor mixtures at trace concentrations is described. The μGC features a micro- preconcentrator/focuser (μPCF), dual-column pressure- and temperature-programmed separation module, and an integrated array of nanoparticle-coated chemiresistors. The latest design modifications and performance data are presented. Highlights include a 4-min separation of a 30-component mixture with a 3-m DRIE Si/glass microcolumn, a 14-sec separation of an 11-component mixture on a 25-cm microcolumn, a complete multi-vapor analysis from a hybrid microsystem that combines analytical, rf- wireless, and microcontroller modules, and a rapid analysis driven by a 4-stage peristaltic micropump.