A DC-Powered High-Voltage Generator using a Bulk Pt-Rh Oscillating Micro-Relay

This paper reports a high voltage generator formed by the hybrid assembly of a micromachined relay and a wound-wire inductor or transformer. The relay is micro-electrodischarge machined from Pt-Rh bulk metal foil, and consists of a normally-closed switch that is part of a DC-powered electrothermal r...

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Bibliographische Detailangaben
Hauptverfasser: Udeshi, K., Gianchandani, Y.B.
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:This paper reports a high voltage generator formed by the hybrid assembly of a micromachined relay and a wound-wire inductor or transformer. The relay is micro-electrodischarge machined from Pt-Rh bulk metal foil, and consists of a normally-closed switch that is part of a DC-powered electrothermal relaxation oscillator. The use of this material permits the relay to be operated in air, without the need for inert packaging. It also provides a resistance of
ISSN:2159-547X
DOI:10.1109/SENSOR.2007.4300339