Power Efficient V-Shape Electro-Thermal Actuator using Constrained SU-8

This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-μm long, 56-μm wide, 60-μm high, 15° bent) demonstrates a large in-plane motion (10 μm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125°C). It is estimated to produce a blocked apex force of 100mN at 1.75V.