Application of the digital holographic interference microscope for thin films investigation

Application of the digital holographic interference microscope for thin films investigation

We used the digital holographic interference microscope (DHIM) for thin films investigation. Three-dimensional (3-D) image of A1N thin film deposited on an acryl substrate by vacuum-arc method .and the results of the film thickness measurement are presented. It has been shown that the DHIM can be su...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Tishko, D.N., Tishko, T.V., Titar, V.P., Zadneprovskiy, Yu.A., Kuprin, A.S., Zgoda, I.V.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Coatings
Holographic optical components
Holography
Interference
Optical films
Optical microscopy
Production
Substrates
Thickness measurement
Transistors
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:We used the digital holographic interference microscope (DHIM) for thin films investigation. Three-dimensional (3-D) image of A1N thin film deposited on an acryl substrate by vacuum-arc method .and the results of the film thickness measurement are presented. It has been shown that the DHIM can be successfully used for film surface quality control, thickness and film damages parameters measurement.
DOI:10.1109/OPT.2007.4298545