Analytical Model of the Electrostatic Scratch Drive Actuator

In the field of micro-electro-mechanical system actuator, the scratch drive actuator (SDA) is the one, which can realize long distance travel with precise nanometer step sizes. In this paper, a newly revisory analytical model of the scratch drive actuator including the effects of the MEMS surface -...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yu Maohua, Wang Xiaojing, Xie Mingchun, Wang Guoliang, Zhang Minliang
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	analytical model Analytical models Arm Drives Electrodes Electrostatic actuators Insulation Insulators Integrated circuit technology MEMS Microelectromechanical systems Micromechanical devices scratch drive actuator surface micromachining processing
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