Analytical Model of the Electrostatic Scratch Drive Actuator

Analytical Model of the Electrostatic Scratch Drive Actuator

In the field of micro-electro-mechanical system actuator, the scratch drive actuator (SDA) is the one, which can realize long distance travel with precise nanometer step sizes. In this paper, a newly revisory analytical model of the scratch drive actuator including the effects of the MEMS surface -...

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Bibliographische Detailangaben
Hauptverfasser: Yu Maohua, Wang Xiaojing, Xie Mingchun, Wang Guoliang, Zhang Minliang
Format: Tagungsbericht
Sprache:eng
Schlagworte:
analytical model
Analytical models
Arm
Drives
Electrodes
Electrostatic actuators
Insulation
Insulators
Integrated circuit technology
MEMS
Microelectromechanical systems
Micromechanical devices
scratch drive actuator
surface micromachining processing
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Beschreibung
Zusammenfassung:In the field of micro-electro-mechanical system actuator, the scratch drive actuator (SDA) is the one, which can realize long distance travel with precise nanometer step sizes. In this paper, a newly revisory analytical model of the scratch drive actuator including the effects of the MEMS surface - micromachining processing parameter and the counterforce of the support arms is proposed. The performance of the SDA is analyzed, such as the critical voltage, the step size and the total displacement. The good agreement between the simulation results and the experimental data is obtained.
DOI:10.1109/HDP.2007.4283653