Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application
Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on recta...
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| creator | Hamid, M.Y. Thangamani, U. Vaya, P.R. |
| description | Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to find out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro-ohm are achieved for an applied load of 1mPa. The sensitivity of the gauge is 0.35με/mPa. |
| doi_str_mv | 10.1109/SMELEC.2006.381070 |
| format | Conference Proceeding |
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Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to find out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro-ohm are achieved for an applied load of 1mPa. 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Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to find out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro-ohm are achieved for an applied load of 1mPa. The sensitivity of the gauge is 0.35με/mPa.</description><subject>Biomembranes</subject><subject>Boundary conditions</subject><subject>Capacitive sensors</subject><subject>Conductors</subject><subject>Electric resistance</subject><subject>Equations</subject><subject>Force measurement</subject><subject>Polyimides</subject><subject>Strain measurement</subject><subject>Stress</subject><isbn>9780780397309</isbn><isbn>0780397304</isbn><isbn>0780397312</isbn><isbn>9780780397316</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotjN1OwjAYhmuMiYq7AT3pDQy_tlt_DglBMBmRgJ5KuvYbqRmMtEOjV--ivCdvnrw_hNwzGDMG5nGznFWz6ZgDyLHQDBRckFtQGoRRgvFLkpkBzgzmmmQpfcCgoiwEFDfkfRP2p9b2oTvQrqGrgD9dvsYUUh8-kS6xty2d29MO6dBYo-vtYTcM4hDt62gPSJsu0qr7oquIKZ0i0snx2Ab393lHrhrbJszOPiJvT7PX6SKvXubP00mVB6bKPq-F8k4WXminS2MVZ8IAmIJbUSIa66ypvfcl1FoYrl0ptZLGSY-i9pJZMSIP_78BEbfHGPY2fm8LLqXkIH4B8RpVtA</recordid><startdate>200611</startdate><enddate>200611</enddate><creator>Hamid, M.Y.</creator><creator>Thangamani, U.</creator><creator>Vaya, P.R.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200611</creationdate><title>Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application</title><author>Hamid, M.Y. ; Thangamani, U. ; Vaya, P.R.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-b37dc64d38c859a7213900942a35ee9aca9bddd50b83928c568769c6de3bd61a3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Biomembranes</topic><topic>Boundary conditions</topic><topic>Capacitive sensors</topic><topic>Conductors</topic><topic>Electric resistance</topic><topic>Equations</topic><topic>Force measurement</topic><topic>Polyimides</topic><topic>Strain measurement</topic><topic>Stress</topic><toplevel>online_resources</toplevel><creatorcontrib>Hamid, M.Y.</creatorcontrib><creatorcontrib>Thangamani, U.</creatorcontrib><creatorcontrib>Vaya, P.R.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hamid, M.Y.</au><au>Thangamani, U.</au><au>Vaya, P.R.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application</atitle><btitle>2006 IEEE International Conference on Semiconductor Electronics</btitle><stitle>SMELEC</stitle><date>2006-11</date><risdate>2006</risdate><spage>304</spage><epage>308</epage><pages>304-308</pages><isbn>9780780397309</isbn><isbn>0780397304</isbn><eisbn>0780397312</eisbn><eisbn>9780780397316</eisbn><abstract>Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to find out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro-ohm are achieved for an applied load of 1mPa. The sensitivity of the gauge is 0.35με/mPa.</abstract><pub>IEEE</pub><doi>10.1109/SMELEC.2006.381070</doi><tpages>5</tpages></addata></record> |
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| subjects | Biomembranes Boundary conditions Capacitive sensors Conductors Electric resistance Equations Force measurement Polyimides Strain measurement Stress |
| title | Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application |
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