Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application

Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application

Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on recta...

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Bibliographische Detailangaben
Hauptverfasser: Hamid, M.Y., Thangamani, U., Vaya, P.R.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomembranes
Boundary conditions
Capacitive sensors
Conductors
Electric resistance
Equations
Force measurement
Polyimides
Strain measurement
Stress
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Zusammenfassung:Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to find out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro-ohm are achieved for an applied load of 1mPa. The sensitivity of the gauge is 0.35με/mPa.
DOI:10.1109/SMELEC.2006.381070