A MEMS Disk Resonator-Based Oscillator

A MEMS Disk Resonator-Based Oscillator

A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different spe...

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Bibliographische Detailangaben
Hauptverfasser: El Khouly, M.M., Nada, Y., Hegazi, E., Ragai, H.F., Ghannam, M.Y.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitance
Circuits
Disk Resonator
Electrodes
Frequency
Frequency Stability
MEMS
Micromechanical devices
Oscillators
Parameter extraction
Phase noise
Pierce Oscillator
Transducers
Voltage
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Beschreibung
Zusammenfassung:A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different specs of the oscillator like frequency, phase noise and frequency stability are investigated. The effect of the presence of the disk resonator on the performance of the oscillator is demonstrated.
ISSN:2159-1660
DOI:10.1109/ICM.2006.373270