A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers

A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers

We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are eval...

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Bibliographische Detailangaben
Hauptverfasser: Mancarella, F., Roncaglia, A., Tamarri, F., Elmi, I., Cardinali, G.C., Severi, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Aluminum
Biomembranes
Doping
Fabrication
Performance evaluation
Platinum
Thermal conductivity
Thermal sensors
Thermoelectricity
Transducers
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Beschreibung
Zusammenfassung:We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2007.355851