Piezoresistive Gas Flow Sensors by Deep RIE Technology

Piezoresistive Gas Flow Sensors by Deep RIE Technology

In this paper, we fabricated drag force type gas flow sensor with dry etching technology which used deep RIE (reactive ion etching) and etching stop technology which used SOI (silicon-on-insulator). we fabricated two kinds of sensor, which are cantilever type and paddle type. Both cantilever and pad...

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Bibliographische Detailangaben
Hauptverfasser: Young-Tae Lee, Kang-Ho Ahn, Yong-Taek Kwon, Takao, H., Ishida, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biosensors
Drag
Dry etching
Fluid flow
Force sensors
Gas detectors
Intelligent sensors
Piezoresistance
Sensor phenomena and characterization
Stress
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Beschreibung
Zusammenfassung:In this paper, we fabricated drag force type gas flow sensor with dry etching technology which used deep RIE (reactive ion etching) and etching stop technology which used SOI (silicon-on-insulator). we fabricated two kinds of sensor, which are cantilever type and paddle type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03 mV/VldrkPa.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2007.355821