Sensitive and Selective Photo Acoustic Gas Sensor Suitable for High Volume Manufacturing

Sensitive and Selective Photo Acoustic Gas Sensor Suitable for High Volume Manufacturing

Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterisation of a photo acoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. 12 prototypes for measuring...

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Hauptverfasser: Schjolberg-Henriksen, K., Ferber, A., Moe, S., Wang, D.T., Bernstein, R.W., Rogne, H., Schulz, O., Muller, G., Lloyd, M., Suphan, K.-H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic measurements
Acoustic sensors
Acoustic signal detection
Gas detectors
Pressure measurement
Prototypes
Pulp manufacturing
Sensor phenomena and characterization
Sensor systems
Temperature sensors
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Beschreibung
Zusammenfassung:Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterisation of a photo acoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. 12 prototypes for measuring CO 2 have been characterised. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained, depending on the measurement time and photo acoustic cell design. No cross-sensitivity towards CO, CH 4 , or humidity could be observed in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO 2 in the range from 25degC to 50degC.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2007.355563