Fast Detection of Hydrogen at Room Temperature Using a Nanoparticle-integrated Microsensor

Fast Detection of Hydrogen at Room Temperature Using a Nanoparticle-integrated Microsensor

A novel nanoparticle-integrated hydrogen microsensor with a very fast response time at room temperature is presented in this work. The sensor was developed by integrating indium dioxide (ln 2 O 3 ) doped polycrystalline tin dioxide (SnO 2 ) nano particles on interdigitated electrodes with a 5 mum sp...

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Bibliographische Detailangaben
Hauptverfasser: Peng Zhang, Deshpande, S., Seal, S., Cho, H.J., Medelius, P.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Aerospace materials
Chemical sensors
Delay
Electrodes
Fingers
Hydrogen
Mechanical sensors
Microsensors
Nanoparticles
Temperature sensors
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Beschreibung
Zusammenfassung:A novel nanoparticle-integrated hydrogen microsensor with a very fast response time at room temperature is presented in this work. The sensor was developed by integrating indium dioxide (ln 2 O 3 ) doped polycrystalline tin dioxide (SnO 2 ) nano particles on interdigitated electrodes with a 5 mum spacing. In this sensor, we obtained a sensor response time as fast as 100 seconds with sensitivity as high as 3,700 for room temperature hydrogen detection.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2007.355560