A Novel Approach to Modeling Metal-Insulator-Metal Capacitors Over Vias With Significant Electrical Length

In monolithic-microwave integrated-circuit design, a metal-insulator-metal (MIM) capacitor is one of the key passive components. Some commonly used MIM capacitor models are optimized for series capacitor applications. These conventional models, however, face a challenge as a need for a shunt capacit...

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Veröffentlicht in:IEEE transactions on microwave theory and techniques 2007-04, Vol.55 (4), p.709-714
Hauptverfasser: Asahara, M., Campbell, C.F., Frensley, W.R.
Format: Artikel
Sprache:eng
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Zusammenfassung:In monolithic-microwave integrated-circuit design, a metal-insulator-metal (MIM) capacitor is one of the key passive components. Some commonly used MIM capacitor models are optimized for series capacitor applications. These conventional models, however, face a challenge as a need for a shunt capacitor application arises. This paper is a solution provider, ushering in a new approach to modeling a shunt capacitor of large electrical length over grounding substrate vias. Our model is derived from a set of design equations that allows asymmetric coupled lines in an inhomogeneous medium to be approximated to symmetric coupled lines in a homogeneous medium. Here we gain a theoretical insight into the rationale behind this approximation. The new approach benefits from: 1) a four-port implementation providing two connections to top and bottom plates and 2) a drastic reduction in mathematical complexity without trading off accuracy or compatibility. Circuit and electromagnetic simulations has proven to be in good agreement with measurements of a test structure of electrical length 558deg at 50 GHz
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2007.892810