Development of a single ion detection system for the implantation of donors with nanoscale precision
The authors have developed a technique which enables the implantation and detection of single low-energy (
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Hauptverfasser: | , , , , , , , |
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | The authors have developed a technique which enables the implantation and detection of single low-energy ( |
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ISSN: | 2150-3591 2150-3605 |
DOI: | 10.1109/ICONN.2006.340679 |