Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources

The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ptitsin, V.E., Tregubov, V.F.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Brightness Cathodes Earth Observing System Electron beams Electron emission Electron sources Instruments Numerical models Probes Vacuum breakdown
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!