Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources

Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources

The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for...

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Bibliographische Detailangaben
Hauptverfasser: Ptitsin, V.E., Tregubov, V.F.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Brightness
Cathodes
Earth Observing System
Electron beams
Electron emission
Electron sources
Instruments
Numerical models
Probes
Vacuum breakdown
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Beschreibung
Zusammenfassung:The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for electrostatic field potential distribution and surface field strength for conventional cathodes
ISSN:2164-2370
DOI:10.1109/IVNC.2006.335424