Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources

Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources

The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Ptitsin, V.E., Tregubov, V.F.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Brightness
Cathodes
Earth Observing System
Electron beams
Electron emission
Electron sources
Instruments
Numerical models
Probes
Vacuum breakdown
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 194
container_issue
container_start_page 193
container_title
container_volume
creator Ptitsin, V.E.
Tregubov, V.F.
description The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for electrostatic field potential distribution and surface field strength for conventional cathodes
doi_str_mv 10.1109/IVNC.2006.335424
format Conference Proceeding
fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_4134526</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4134526</ieee_id><sourcerecordid>4134526</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-a665cfb6a50f534e666902f4ab9cd8c582fede45bb99b4afdf9c0ba2a12daebe3</originalsourceid><addsrcrecordid>eNo9jEtLw0AUhQdUsNbuBTf5A4l3nmaWElot1HZhEHdlHnfsSNqUmXThvzc-cHXgfN85hNxQqCgFfbd8XTcVA1AV51IwcUau6BgCBFA4JxNGlSgZv4dLMsv5AwA4o7QGMSFv69MeU3SmK557j108vBd9KOYduiH1h3JzHH5gszPJuGFU81jkb6fdYdqPaBGx8_-L4qU_JYf5mlwE02Wc_eWUtIt52zyVq83jsnlYlVHDUBqlpAtWGQlBcoFKKQ0sCGO187WTNQvoUUhrtbbCBB-0A2uYocwbtMin5Pb3NiLi9pji3qTPraBcSKb4F_moU1c</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Ptitsin, V.E. ; Tregubov, V.F.</creator><creatorcontrib>Ptitsin, V.E. ; Tregubov, V.F.</creatorcontrib><description>The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for electrostatic field potential distribution and surface field strength for conventional cathodes</description><identifier>ISSN: 2164-2370</identifier><identifier>ISBN: 1424404010</identifier><identifier>ISBN: 9781424404018</identifier><identifier>DOI: 10.1109/IVNC.2006.335424</identifier><language>eng</language><publisher>IEEE</publisher><subject>Brightness ; Cathodes ; Earth Observing System ; Electron beams ; Electron emission ; Electron sources ; Instruments ; Numerical models ; Probes ; Vacuum breakdown</subject><ispartof>2006 19th International Vacuum Nanoelectronics Conference, 2006, p.193-194</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4134526$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,27904,54899</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4134526$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Ptitsin, V.E.</creatorcontrib><creatorcontrib>Tregubov, V.F.</creatorcontrib><title>Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources</title><title>2006 19th International Vacuum Nanoelectronics Conference</title><addtitle>IVNC</addtitle><description>The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for electrostatic field potential distribution and surface field strength for conventional cathodes</description><subject>Brightness</subject><subject>Cathodes</subject><subject>Earth Observing System</subject><subject>Electron beams</subject><subject>Electron emission</subject><subject>Electron sources</subject><subject>Instruments</subject><subject>Numerical models</subject><subject>Probes</subject><subject>Vacuum breakdown</subject><issn>2164-2370</issn><isbn>1424404010</isbn><isbn>9781424404018</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo9jEtLw0AUhQdUsNbuBTf5A4l3nmaWElot1HZhEHdlHnfsSNqUmXThvzc-cHXgfN85hNxQqCgFfbd8XTcVA1AV51IwcUau6BgCBFA4JxNGlSgZv4dLMsv5AwA4o7QGMSFv69MeU3SmK557j108vBd9KOYduiH1h3JzHH5gszPJuGFU81jkb6fdYdqPaBGx8_-L4qU_JYf5mlwE02Wc_eWUtIt52zyVq83jsnlYlVHDUBqlpAtWGQlBcoFKKQ0sCGO187WTNQvoUUhrtbbCBB-0A2uYocwbtMin5Pb3NiLi9pji3qTPraBcSKb4F_moU1c</recordid><startdate>200607</startdate><enddate>200607</enddate><creator>Ptitsin, V.E.</creator><creator>Tregubov, V.F.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200607</creationdate><title>Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources</title><author>Ptitsin, V.E. ; Tregubov, V.F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-a665cfb6a50f534e666902f4ab9cd8c582fede45bb99b4afdf9c0ba2a12daebe3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Brightness</topic><topic>Cathodes</topic><topic>Earth Observing System</topic><topic>Electron beams</topic><topic>Electron emission</topic><topic>Electron sources</topic><topic>Instruments</topic><topic>Numerical models</topic><topic>Probes</topic><topic>Vacuum breakdown</topic><toplevel>online_resources</toplevel><creatorcontrib>Ptitsin, V.E.</creatorcontrib><creatorcontrib>Tregubov, V.F.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE/IET Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ptitsin, V.E.</au><au>Tregubov, V.F.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources</atitle><btitle>2006 19th International Vacuum Nanoelectronics Conference</btitle><stitle>IVNC</stitle><date>2006-07</date><risdate>2006</risdate><spage>193</spage><epage>194</epage><pages>193-194</pages><issn>2164-2370</issn><isbn>1424404010</isbn><isbn>9781424404018</isbn><abstract>The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for electrostatic field potential distribution and surface field strength for conventional cathodes</abstract><pub>IEEE</pub><doi>10.1109/IVNC.2006.335424</doi><tpages>2</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 2164-2370
ispartof 2006 19th International Vacuum Nanoelectronics Conference, 2006, p.193-194
issn 2164-2370
language eng
recordid cdi_ieee_primary_4134526
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Brightness
Cathodes
Earth Observing System
Electron beams
Electron emission
Electron sources
Instruments
Numerical models
Probes
Vacuum breakdown
title Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-22T18%3A08%3A21IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Numerical%20Modeling%20of%20Electron-Optical%20Characteristics%20of%20Thermal%20Field%20Electron%20Sources&rft.btitle=2006%2019th%20International%20Vacuum%20Nanoelectronics%20Conference&rft.au=Ptitsin,%20V.E.&rft.date=2006-07&rft.spage=193&rft.epage=194&rft.pages=193-194&rft.issn=2164-2370&rft.isbn=1424404010&rft.isbn_list=9781424404018&rft_id=info:doi/10.1109/IVNC.2006.335424&rft_dat=%3Cieee_6IE%3E4134526%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=4134526&rfr_iscdi=true