A MEMS-Stabilized AC Voltage Reference Source

A MEMS-Stabilized AC Voltage Reference Source

Two electronic circuits are described in which the pull-in voltage of capacitive microelectromechanical system (MEMS) devices is applied as a reference for a stable alternating voltage source at frequencies between 5 kHz and 100 kHz. The first circuit is a simple harmonic oscillator. This low-cost c...

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Veröffentlicht in:IEEE transactions on instrumentation and measurement 2007-04, Vol.56 (2), p.313-315
1. Verfasser: Dierikx, E.F.
Format: Artikel
Sprache:eng
Schlagworte:
Alternating current (ac) voltage
capacitive microelectromechanical system (MEMS)
Capacitors
Circuit stability
Circuits
Electric potential
Electronic circuits
feedback circuits
Frequency
Instrumentation
microelectromechanical devices
Microelectromechanical systems
Micromechanical devices
Oscillators
p ull-in voltage
Power harmonic filters
Stability
Transfer functions
Voltage
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Beschreibung
Zusammenfassung:Two electronic circuits are described in which the pull-in voltage of capacitive microelectromechanical system (MEMS) devices is applied as a reference for a stable alternating voltage source at frequencies between 5 kHz and 100 kHz. The first circuit is a simple harmonic oscillator. This low-cost circuit is capable of achieving a stability of better than 10 muV/V over one day. The second circuit shows a concept for a self-adjusting feedback technique. The circuit adjusts itself to operate the MEMS capacitor at its pull-in voltage
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2007.890799