Development of Multi-axial Micro Force Measurement Method for Electronic Device Assembly

A multi-axial micro force measurement system that can detect contact information of micro-scaled object interactions is presented. An accurate measurement of forces in the range of milli or micro newtons becomes an essential tool for the development of high-precision robot systems. The presented force measurement system consists of semiconductor strain gauges and 6-axis force/torque sensor. Implementation of the dual semiconductor strain gauges with a 6-axis force/torque sensor that are installed on a small manipulator system enables the identification of the applied force and contact position. Theoretical consideration of the method followed by an experimental verification is provided