Automated calculation of piezoresistive microsensors by CAD/CAM/CAE
The control program is developed for conducting of the automated calculation of piezoresistive microsensors type for measuring of pressure by the API functions of CAD/CAM/CAE. Research of influencing of geometrical parameters and pressure is conducted on initial descriptions of sensor
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | The control program is developed for conducting of the automated calculation of piezoresistive microsensors type for measuring of pressure by the API functions of CAD/CAM/CAE. Research of influencing of geometrical parameters and pressure is conducted on initial descriptions of sensor |
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DOI: | 10.1109/MEMSTECH.2006.288658 |