CMOS-Compatible All-Si High-Speed Waveguide Photodiodes With High Responsivity in Near-Infrared Communication Band

Submicrometer silicon photodiode waveguides, fabricated on silicon-on-insulator substrates, have photoresponse from

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Bibliographische Detailangaben
Veröffentlicht in:	IEEE photonics technology letters 2007-02, Vol.19 (3), p.152-154
Hauptverfasser:	Geis, M.W., Spector, S.J., Grein, M.E., Schulein, R.T., Yoon, J.U., Lennon, D.M., Deneault, S., Gan, F., Kaertner, F.X., Lyszczarz, T.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption Bandwidth Conductivity Contacts Divacancies High speed optical techniques Integrated optoelectronics Ion implantation near-infrared Optical waveguides Particle beam optics Photocurrent photodetectors Photodiodes Photoelectric effect PIN photodiodes Semiconductors Silicon silicon (Si) optoelectronics silicon (Si) waveguide Silicon on insulator technology Silicon substrates Waveguides
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Beschreibung
Zusammenfassung:	Submicrometer silicon photodiode waveguides, fabricated on silicon-on-insulator substrates, have photoresponse from
ISSN:	1041-1135 1941-0174
DOI:	10.1109/LPT.2006.890109