Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers

Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers

In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds...

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Hauptverfasser: Menoni, C.S., Vaschenko, G., Brizuela, F., Brewer, C., Wang, Y., Larotonda, M.A., Luther, B.M., Marconi, M.C., Rocca, J.J., Chao, W., Liddle, J.A., Liu, Y., Anderson, E.H., Attwood, D.T., Vinogradov, A.V., Artioukov, I.A., Pershyn, Y.P., Kondratenko, V.V.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomedical optical imaging
Chaos
Image resolution
Laser modes
Nanobioscience
Optical imaging
Optical microscopy
Optical saturation
Spatial resolution
Ultraviolet sources
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Beschreibung
Zusammenfassung:In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2006.279114