Geometry Dependence of Leaky-Mode, Waveguide-Coupled, Polysilicon Photodetectors

Geometry Dependence of Leaky-Mode, Waveguide-Coupled, Polysilicon Photodetectors

Characterization of leaky-mode coupled polysilicon MSM photodetectors fabricated in 0.35 mum commercial CMOS with varying contact spacing and length reveals short and narrow devices have responsivity sufficient for optical interconnect applications

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Bibliographische Detailangaben
Hauptverfasser: Pownall, B., Yuan, G., Chen, T.W., Nikkel, P., Lear, K.L.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
CMOS technology
Detectors
Geometry
Optical attenuators
Optical fiber testing
Optical scattering
Optical waveguides
Photoconductivity
Photodetectors
Silicon
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Beschreibung
Zusammenfassung:Characterization of leaky-mode coupled polysilicon MSM photodetectors fabricated in 0.35 mum commercial CMOS with varying contact spacing and length reveals short and narrow devices have responsivity sufficient for optical interconnect applications
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2006.279080